SRX system

Check out some features of the SRX System from RKC Instrument Inc. This system is specially developed for rapid thermal processing RTP in the semiconductor industry. It has therefore a high speed measurement frequency of 40 PID calculations per second.

– SRX general leaflet
– SRX detailed information leaflet

Click here to easily request a quotation for the SRX system.

Measuring frequency

The SRX system has a fast measuring frequency of 40 measurements and PID calculations per second.

Dual loop control

Dual loop control can be performed with a single compact module. A maximum of 31 modules can be connected for a control with 62 loops.