Check out some features of the SRX System from RKC Instrument Inc. This system is specially developed for rapid thermal processing RTP in the semiconductor industry. It has therefore a high speed measurement frequency of 40 PID calculations per second.
– SRX general leaflet
– SRX detailed information leaflet
Click here to easily request a quotation for the SRX system.
Measuring frequency
The SRX system has a fast measuring frequency of 40 measurements and PID calculations per second.
Dual loop control
Dual loop control can be performed with a single compact module. A maximum of 31 modules can be connected for a control with 62 loops.
